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Reflecting the rapid growth of the MEMS field and the commitment and success of its research community, the IEEE MEMS Conference series has evolved into a premier annual event in the MEMS area.

In recent years, the IEEE MEMS Conference has attracted more than 700 participants, 800+ abstract submissions and has created the forum to present over 200 select papers in non-overlapping oral and poster sessions. Its single-session format provides ample opportunity for interaction between attendees, presenters and exhibitors. The 39th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2026) is one of the premier annual events reporting research results on every aspect of MEMS and Microsystems technology, as well as their relevant technologies and industrial trends. In particular, IEEE MEMS 2026 will bring more industrial elements to broaden the impact towards various application scenarios, showing its significance on more-than-Moore era.

IEEE MEMS 2026 will be held in Salzburg, Austria, from 25 - 29 January 2026.

The major areas of activity in the development of MEMS solicited and expected at this conference include but are not limited to:
Design, simulation and analysis tools with experimental verification
Fabrication technologies and processes
Silicon and non-silicon materials
Electro-mechanical integration techniques
Assembly and packaging approaches
Metrology and operational evaluation techniques
System architecture
The major areas of activity in the application of MEMS solicited and expected at this conference include but are not limited to:
Mechanical, thermal, and magnetic sensors and actuators, and system
Opto-mechanical microdevices and microsystems
Fluidic microcomponents and microsystems
Microdevices for data storage
Microdevices for biomedical engineering
Micro chemical analysis systems
Microdevices and systems for wireless communication
Microdevices for power supply and energy harvesting
Nano-electro-mechanical devices and systems
Scientific microinstruments

Conference Chairs:
Andreu Llobera - Silicon Austria Labs, AUSTRIA
Ashwin Seshia - Cambridge University, UK

Conference Location:
Salzburg Congress
Auerspergstraße 6
5020 Salzburg